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1

Piezoelectric aluminum nitride thin films for microelectromechanical systems

Piazza, Gianluca, Felmetsger, Valeriy, Muralt, Paul, Olsson III, Roy H., Ruby, Richard

Journal:

Year:

2012

Language:

english

File:

PDF, 1.14 MB

english, 2012

2

Effect of pre-deposition RF plasma etching on wafer surface morphology and crystal orientation of piezoelectric AlN thin films

Felmetsger, V., Mikhov, M., Laptev, P.

Journal:

IEEE Transactions on Ultrasonics Ferroelectrics and Frequency Control

Year:

2015

Language:

english

File:

PDF, 13.12 MB

english, 2015

3

Dual cathode DC–RF and MF–RF coupled S-Guns for reactive sputtering

V. Felmetsger, P. Laptev

Journal:

Year:

2004

Language:

english

File:

PDF, 239 KB

english, 2004

4

Low-thickness high-quality aluminum nitride films for super high frequency solidly mounted resonators

E. Iborra, M. Clement, J. Capilla, J. Olivares, V. Felmetsger

Journal:

Thin Solid Films

Year:

2012

Language:

english

File:

PDF, 1.06 MB

english, 2012

5

Temperature-compensated aluminum nitride lamb wave resonators

Chih-ming Lin, Ting-ta Yen, Yun-ju Lai, Felmetsger, V.V., Hopcroft, M.A., Kuypers, J.H., Pisano, A.P.

Journal:

IEEE Transactions on Ultrasonics Ferroelectrics and Frequency Control

Year:

2010

Language:

english

File:

PDF, 1.27 MB

english, 2010

6

[IEEE TRANSDUCERS 2009 - 2009 International Solid-State Sensors, Actuators and Microsystems Conference - Denver, CO, USA (2009.06.21-2009.06.25)] TRANSDUCERS 2009 - 2009 International Solid-State Sensors, Actuators and Microsystems Conference - Ultra thin AlN piezoelectric nano-actuators

Sinha, N., Wabiszewski, G.E., Mahameed, R., Felmetsger, V. V., Tanner, S. M., Carpick, R.W., Piazza, G.

Year:

2009

Language:

english

File:

PDF, 1.36 MB

english, 2009

7

[IEEE 2012 IEEE 25th International Conference on Micro Electro Mechanical Systems (MEMS) - Paris, France (2012.01.29-2012.02.2)] 2012 IEEE 25th International Conference on Micro Electro Mechanical Systems (MEMS) - Micromachined aluminum nitride acoustic resonators with an epitaxial silicon carbide layer utilizing high-order Lamb wave modes

Lin, Chih-Ming, Chen, Yung-Yu, Felmetsger, Valery V., Vigevani, Gabriele, Senesky, Debbie G., Pisano, Albert P.

Year:

2012

Language:

english

File:

PDF, 2.12 MB

english, 2012

8

[IEEE 2011 IEEE International Ultrasonics Symposium (IUS) - Orlando, FL, USA (2011.10.18-2011.10.21)] 2011 IEEE International Ultrasonics Symposium - Reactive magnetron sputtering of piezoelectric Cr-doped AlN thin films

Felmetsger, V. V., Mikhov, M. K.

Year:

2011

Language:

english

File:

PDF, 12.61 MB

english, 2011

9

High-adhesive back side metallization of ultrathin wafers

Felmetsger, Valery V.

Journal:

Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures

Year:

2007

Language:

english

File:

PDF, 665 KB

english, 2007

10

Design, operation mode, and stress control capability of S-Gun magnetron for ac reactive sputtering

V.V. Felmetsger, P.N. Laptev, S.M. Tanner

Journal:

Surface and Coatings Technology

Year:

2009

Language:

english

File:

PDF, 512 KB

english, 2009

11

[IEEE 2012 IEEE 25th International Conference on Micro Electro Mechanical Systems (MEMS) - Paris, France (2012.01.29-2012.02.2)] 2012 IEEE 25th International Conference on Micro Electro Mechanical Systems (MEMS) - High power and low temperature coefficient of frequency oscillator based on a fully anchored and oxide compensated ALN contour-mode MEMS resonator

Rinaldi, M., Tazzoli, A., Segovia-Fernandez, J., Felmetsger, V., Piazza, G.

Year:

2012

Language:

english

File:

PDF, 1.55 MB

english, 2012

12

AlN/3C–SiC Composite Plate Enabling High-Frequency and High-Q Micromechanical Resonators

Chih-Ming Lin, Yung-Yu Chen, Valery V. Felmetsger, Debbie G. Senesky, Albert P. Pisano

Journal:

Advanced Materials

Year:

2012

Language:

english

File:

PDF, 555 KB

english, 2012

13

Micromechanical Resonators: AlN/3C–SiC Composite Plate Enabling High-Frequency and High-Q Micromechanical Resonators (Adv. Mater. 20/2012)

Chih-Ming Lin, Yung-Yu Chen, Valery V. Felmetsger, Debbie G. Senesky, Albert P. Pisano

Journal:

Advanced Materials

Year:

2012

File:

PDF, 3.38 MB

2012

14

An Experience in Testing the Security of Real-World Electronic Voting Systems

Balzarotti, D., Banks, G., Cova, M., Felmetsger, V., Kemmerer, R., Robertson, W., Valeur, F., Vigna, G.

Journal:

IEEE Transactions on Software Engineering

Year:

2010

Language:

english

File:

PDF, 1.05 MB

english, 2010

15

[IEEE 2010 IEEE Ultrasonics Symposium (IUS) - San Diego, CA, USA (2010.10.11-2010.10.14)] 2010 IEEE International Ultrasonics Symposium - Surface acoustic wave propagation properties in AlN/3C-SiC/Si composite structure

Lin, Chih-Ming, Chen, Yung-Yu, Felmetsger, Valery V., Yen, Ting-Ta, Lien, Wei-Cheng, Senesky, Debbie G., Pisano, Albert P.

Year:

2010

Language:

english

File:

PDF, 1.71 MB

english, 2010

16

[IEEE 2010 IEEE Ultrasonics Symposium (IUS) - San Diego, CA, USA (2010.10.11-2010.10.14)] 2010 IEEE International Ultrasonics Symposium - Optimization of thin AlN sputtered films for X-band BAW resonators

Iborra, E., Clement, M., Capilla, J., Olivares, J., Felmetsger, V.

Year:

2010

Language:

english

File:

PDF, 957 KB

english, 2010

17

[IEEE 2013 IEEE 26th International Conference on Micro Electro Mechanical Systems (MEMS) - Taipei, Taiwan (2013.01.20-2013.01.24)] 2013 IEEE 26th International Conference on Micro Electro Mechanical Systems (MEMS) - Two-port filters and resonators on AlN/3C-SiC plates utilizing high-order Lamb wave modes

Lin, Chih-Ming, Chen, Yung-Yu, Felmetsge, Valery V., Senesky, Debbie G., Pisano, Albert P.

Year:

2013

Language:

english

File:

PDF, 572 KB

english, 2013

18

[IEEE 2010 IEEE 23rd International Conference on Micro Electro Mechanical Systems (MEMS) - Wanchai, Hong Kong, China (2010.01.24-2010.01.28)] 2010 IEEE 23rd International Conference on Micro Electro Mechanical Systems (MEMS) - Characterization of aluminum nitride lamb wave resonators operating at 600°C for harsh environment RF applications

Yen, Ting-Ta, Lin, Chih-Ming, Zhao, Xu, Felmetsger, Valery V., Senesky, Debbie G., Hopcroft, Matthew A., Pisano, Albert P.

Year:

2010

Language:

english

File:

PDF, 517 KB

english, 2010

19

Dual cathode DC?RF and MF?RF coupled S-Guns for reactive sputtering

Journal:

Year:

2004

Language:

english

File:

PDF, 239 KB

english, 2004

20

[ACM Press the 14th ACM conference - Alexandria, Virginia, USA (2007.10.28-2007.10.31)] Proceedings of the 14th ACM conference on Computer and communications security - CCS '07 - Multi-module vulnerability analysis of web-based applications

Balzarotti, Davide, Cova, Marco, Felmetsger, Viktoria V., Vigna, Giovanni

Year:

2007

Language:

english

File:

PDF, 312 KB

english, 2007

21

Surface acoustic wave devices on AlN/3C–SiC/Si multilayer structures

Lin, Chih-Ming, Chen, Yung-Yu, Felmetsger, Valery V, Lien, Wei-Cheng, Riekkinen, Tommi, Senesky, Debbie G, Pisano, Albert P

Journal:

Journal of Micromechanics and Microengineering

Year:

2013

Language:

english

File:

PDF, 890 KB

english, 2013

22

[IEEE 2009 IEEE International Ultrasonics Symposium - Rome, Italy (2009.09.20-2009.09.23)] 2009 IEEE International Ultrasonics Symposium - Microstructure of piezoelectric AlN films deposited by AC reactive sputtering

Tanner, S. M., Felmetsger, V. V.

Year:

2009

Language:

english

File:

PDF, 2.79 MB

english, 2009

23

[IEEE 2012 IEEE International Frequency Control Symposium (FCS) - Baltimore, MD, USA (2012.05.21-2012.05.24)] 2012 IEEE International Frequency Control Symposium Proceedings - Deposition of smooth and highly (111) textured Al bottom electrodes for AlN-based electroacoustic devices

Felmetsger, V. V., Mikhov, M. K.

Year:

2012

Language:

english

File:

PDF, 993 KB

english, 2012

24

[IEEE 2008 IEEE Symposium on Security and Privacy (sp 2008) - Oakland, CA, USA (2008.05.18-2008.05.22)] 2008 IEEE Symposium on Security and Privacy (sp 2008) - Saner: Composing Static and Dynamic Analysis to Validate Sanitization in Web Applications

Balzarotti, Davide, Cova, Marco, Felmetsger, Vika, Jovanovic, Nenad, Kirda, Engin, Kruegel, Christopher, Vigna, Giovanni

Year:

2008

Language:

english

File:

PDF, 320 KB

english, 2008

25

[IEEE 2008 IEEE International Frequency Control Symposium - Honolulu, HI (2008.05.19-2008.05.21)] 2008 IEEE International Frequency Control Symposium - Stress control in AlN and Mo films for electro-acoustic devices

Felmetsger, Valery V., Laptev, Pavel. N.

Year:

2008

Language:

english

File:

PDF, 1020 KB

english, 2008

26

[IEEE 10th IEEE International Conference on Engineering of Complex Computer Systems (ICECCS'05) - Shanghai, China (16-20 June 2005)] 10th IEEE International Conference on Engineering of Complex Computer Systems (ICECCS'05) - Exploiting OS-Level Mechanisms to Implement Mobile Code Security

Felmetsger, V., Vigna, G.

Year:

2005

Language:

english

File:

PDF, 166 KB

english, 2005

27

[IEEE 2008 IEEE Ultrasonics Symposium (IUS) - Beijing, China (2008.11.2-2008.11.5)] 2008 IEEE Ultrasonics Symposium - Crystal orientation and stress in AC reactively sputtered AlN films on Mo electrodes for electro-acoustic devices

Felmetsger, Valery V., Laptev, Pavel N., Tanner, Shawn M.

Year:

2008

Language:

english

File:

PDF, 1.41 MB

english, 2008

28

[IEEE 2011 Joint conference of the IEEE International Frequency Control and the European Frequency and Time Forum (FCS) - San Francisco, CA, USA (2011.05.2-2011.05.5)] 2011 Joint Conference of the IEEE International Frequency Control and the European Frequency and Time Forum (FCS) Proceedings - Characteristics of AlN Lamb wave resonators with various bottom electrode configurations

Lin, Chih-Ming, Yantchev, Ventsislav, Chen, Yung-Yu, Felmetsger, Valery V., Pisano, Albert P.

Year:

2011

Language:

english

File:

PDF, 304 KB

english, 2011

29

[IEEE 2011 IEEE International Ultrasonics Symposium (IUS) - Orlando, FL, USA (2011.10.18-2011.10.21)] 2011 IEEE International Ultrasonics Symposium - Intrinsic characteristics of thermally stable AlN Lamb wave resonators at high temperatures

Lin, Chih-Ming, Yen, Ting-Ta, Felmetsger, Valery V., Kuypers, Jan H., Pisano, Albert P.

Year:

2011

Language:

english

File:

PDF, 444 KB

english, 2011

30

Microstructure and temperature coefficient of resistance of thin cermet resistor films deposited from CrSi[sub 2]–Cr–SiC targets by S-gun magnetron

Felmetsger, Valery V.

Journal:

Journal of Vacuum Science & Technology A Vacuum Surfaces and Films

Year:

2010

Language:

english

File:

PDF, 1.32 MB

english, 2010

31

Innovative technique for tailoring intrinsic stress in reactively sputtered piezoelectric aluminum nitride films

Felmetsger, V. V., Laptev, P. N., Tanner, S. M.

Journal:

Journal of Vacuum Science & Technology A Vacuum Surfaces and Films

Year:

2009

Language:

english

File:

PDF, 819 KB

english, 2009

32

[IEEE 2013 IEEE International Ultrasonics Symposium (IUS) - Prague, Czech Republic (2013.07.21-2013.07.25)] 2013 IEEE International Ultrasonics Symposium (IUS) - Acoustic characteristics of the third-order quasi-symmetric Lamb wave mode in an AlN/3C-SiC plate

Lin, Chih-Ming, Chen, Yung-Yu, Felmetsger, Valery V., Senesky, Debbie G., Pisano, Albert P.

Year:

2013

Language:

english

File:

PDF, 835 KB

english, 2013

33

[IEEE 2009 Joint Meeting of the European Frequency and Time Forum (EFTF) and the IEEE International Frequency Control Symposium (FCS) - Besancon, France (2009.04.20-2009.04.24)] 2009 IEEE International Frequency Control Symposium Joint with the 22nd European Frequency and Time forum - Experimental study of temperature-compensated aluminum nitride Lamb wave resonators

Lin, Chih-Ming, Yen, Ting-Ta, Lai, Yun-Ju, Felmetsger, Valery V., Hopcroft, Matthew A., Kuypers, Jan H., Pisano, Albert P.

Year:

2009

Language:

english

File:

PDF, 1004 KB

english, 2009

34

Thermally compensated aluminum nitride Lamb wave resonators for high temperature applications

Lin, Chih-Ming, Yen, Ting-Ta, Felmetsger, Valery V., Hopcroft, Matthew A., Kuypers, Jan H., Pisano, Albert P.

Journal:

Applied Physics Letters

Year:

2010

Language:

english

File:

PDF, 683 KB

english, 2010

35

Microstructure and chemical wet etching characteristics of AlN films deposited by ac reactive magnetron sputtering

Tanner, S. M., Felmetsger, V. V.

Journal:

Journal of Vacuum Science & Technology A Vacuum Surfaces and Films

Year:

2010

Language:

english

File:

PDF, 1.80 MB

english, 2010

36

[IEEE 2013 Joint European Frequency and Time Forum & International Frequency Control Symposium (EFTF/IFC) - Prague, Czech Republic (2013.07.21-2013.07.25)] 2013 Joint European Frequency and Time Forum & International Frequency Control Symposium (EFTF/IFC) - Piezoelectric and electroacoustic properties of V-doped and Ta-doped AlN thin films

Iborra, Enrique, Olivares, Jimena, Clement, Marta, Capilla, Jose, Felmetsger, Valeriy, Mikhov, Mikhail

Year:

2013

Language:

english

File:

PDF, 694 KB

english, 2013

37

Piezoelectric aluminum nitride nanoelectromechanical actuators

Sinha, Nipun, Wabiszewski, Graham E., Mahameed, Rashed, Felmetsger, Valery V., Tanner, Shawn M., Carpick, Robert W., Piazza, Gianluca

Journal:

Applied Physics Letters

Year:

2009

Language:

english

File:

PDF, 455 KB

english, 2009

38

AlN thin films grown on epitaxial 3C–SiC (100) for piezoelectric resonant devices

Lin, Chih-Ming, Lien, Wei-Cheng, Felmetsger, Valery V., Hopcroft, Matthew A., Senesky, Debbie G., Pisano, Albert P.

Journal:

Applied Physics Letters

Year:

2010

Language:

english

File:

PDF, 968 KB

english, 2010

39

[IEEE 2013 Transducers & Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS & EUROSENSORS XXVII) - Barcelona, Spain (2013.06.16-2013.06.20)] 2013 Transducers & Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS & EUROSENSORS XXVII) - High-temperature stable piezoelectric aluminum nitride energy harvesters utilizing elastically supported diaphragms

Lai, Yun-Ju, Li, Wei-Chang, Lin, Chih-Ming, Felmetsger, Valery V., Pisano, Albert P.

Year:

2013

Language:

english

File:

PDF, 1.56 MB

english, 2013

40

[IEEE 2014 IEEE International Ultrasonics Symposium (IUS) - Chicago, IL, USA (2014.9.3-2014.9.6)] 2014 IEEE International Ultrasonics Symposium - Effect of pre-deposition rf plasma etching on wafer surface morphology and crystal orientation of piezoelectric AlN thin films

Felmetsger, V. V., Mikhov, M. K., Laptev, P. N.

Year:

2014

Language:

english

File:

PDF, 2.20 MB

english, 2014

41

[IEEE 2012 IEEE International Ultrasonics Symposium - Dresden, Germany (2012.10.7-2012.10.10)] 2012 IEEE International Ultrasonics Symposium - Piezoelectric and electroacoustic properties of Ti-doped AlN thin films as a function of Ti content

Iborra, Enrique, Capilla, Jose, Olivares, Jimena, Clement, Marta, Felmetsger, Valeriy

Year:

2012

Language:

english

File:

PDF, 610 KB

english, 2012

42

[IEEE 2012 IEEE International Ultrasonics Symposium - Dresden, Germany (2012.10.7-2012.10.10)] 2012 IEEE International Ultrasonics Symposium - Reactive sputtering of highly c-axis textured Ti-doped AlN thin films

Felmetsger, V. V., Mikhov, M. K.

Year:

2012

Language:

english

File:

PDF, 1.43 MB

english, 2012

43

[IEEE 2010 IEEE International Frequency Control Symposium (FCS) - Newport Beach, CA, USA (2010.06.1-2010.06.4)] 2010 IEEE International Frequency Control Symposium - Thermal compensation for aluminum nitride Lamb wave resonators operating at high temperature

Lin, Chih-Ming, Yen, Ting-Ta, Felmetsger, Valery V., Hopcroft, Matthew A., Kuypers, Jan H., Pisano, Albert P.

Year:

2010

Language:

english

File:

PDF, 763 KB

english, 2010

44

[IEEE 2006 22nd Annual Computer Security Applications Conference (ACSAC'06) - Miami Beach, FL, USA (2006.12.11-2006.12.11)] 2006 22nd Annual Computer Security Applications Conference (ACSAC'06) - Static Detection of Vulnerabilities in x86 Executables

Cova, Marco, Felmetsger, Viktoria, Banks, Greg, Vigna, Giovanni

Year:

2006

Language:

english

File:

PDF, 262 KB

english, 2006

45

[IEEE 2011 IEEE International Ultrasonics Symposium (IUS) - Orlando, FL, USA (2011.10.18-2011.10.21)] 2011 IEEE International Ultrasonics Symposium - Ta2O5/SiO2 insulating acoustic mirrors for AlN-based X-band BAW resonators

Capilla, J., Olivares, J., Clement, M., Sangrador, J., Iborra, E., Felmetsger, V., Devos, A.

Year:

2011

Language:

english

File:

PDF, 511 KB

english, 2011

46

[IEEE 2012 IEEE International Ultrasonics Symposium - Dresden, Germany (2012.10.7-2012.10.10)] 2012 IEEE International Ultrasonics Symposium - Dispersion characteristics of high-order lamb wave modes in an AlN/3C-SiC layered plate

Lin, Chih-Ming, Chen, Yung-Yu, Felmetsger, Valery V., Senesky, Debbie G., Pisano, Albert P.

Year:

2012

Language:

english

File:

PDF, 222 KB

english, 2012

47

[ACM Press the 2008 international symposium - Seattle, WA, USA (2008.07.20-2008.07.24)] Proceedings of the 2008 international symposium on Software testing and analysis - ISSTA '08 - Are your votes really counted?

Balzarotti, Davide, Banks, Greg, Cova, Marco, Felmetsger, Viktoria, Kemmerer, Richard, Robertson, William, Valeur, Fredrik, Vigna, Giovanni

Year:

2008

Language:

english

File:

PDF, 283 KB

english, 2008

48

SPIE Proceedings [SPIE SPIE Defense, Security, and Sensing - Baltimore, Maryland, USA (Monday 23 April 2012)] Micro- and Nanotechnology Sensors, Systems, and Applications IV - Piezoelectric nonlinear nanomechanical temperature and acceleration insensitive clocks

Tazzoli, A., George, Thomas, Islam, M. Saif, Piazza, G., Rinaldi, M., Dutta, Achyut, Segovia, J., Cassella, C., Otis, B., Shi, J., Turner, K., Burgner, C., McNaul, K., Bail, D., Felmetsger, V.

Year:

2012

Language:

english

File:

PDF, 893 KB

english, 2012

49

[IEEE 2015 Joint Conference of the IEEE International Frequency Control Symposium & the European Frequency and Time Forum (FCS) - Denver, CO, USA (2015.4.12-2015.4.16)] 2015 Joint Conference of the IEEE International Frequency Control Symposium & the European Frequency and Time Forum - Sputtered Al(1−x)ScxN thin films with high areal uniformity for mass production

Felmetsger, V., Mikhov, M., DeMiguel-Ramos, M., Clement, M., Olivares, J., Mirea, T., Iborra, E.

Year:

2015

File:

PDF, 920 KB

2015

50

SPIE Proceedings [SPIE SPIE Sensing Technology + Applications - Baltimore, Maryland, USA (Monday 5 May 2014)] Sensors for Extreme Harsh Environments - High temperature energy harvesters utilizing ALN/3C-SiC composite diaphragms

Senesky, Debbie G., Dekate, Sachin, Lai, Yun-Ju, Li, Wei-Chang, Felmetsger, Valery V., Senesky, Debbie G., Pisano, Albert P.

Year:

2014

Language:

english

File:

PDF, 1.27 MB

english, 2014